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Surfaceinspect

SURFACEINSPECT™ system

for high-precision 3D metrology

NOVACAMTM SURFACEINSPECTTM system is a modular, non-contact 3D metrology system that:

The SURFACEINSPECT system galvo scanner acquires surfaces in a raster fashion. Standard fields of view (FOV) go up to 85 x 85 mm. Larger samples are acquired by displacing the galvo scanner and/or samples using linear stages.
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