Displacement Sensor
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Displacement Measuring Interferometer
IDS3010 – minitaturized displacement measurement
Product Features :
certified accuracy
- accuracy in nanometer range
large distance range
- from a few mm up to 30 m
compact and modular design
- 3-Axis measurement, sensor heads down to Ø 1.2 mm
vacuum and clean room compatible
- UHV .. 10 bar, a few mK .. 423 K