Deep UV laser mirrors
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Deep UV laser mirrors
- Deep-UV laser mirrors with no aging due to dielectric coatings
- High repeatability and low scattering
- Highly customised and application optimised solutions
- Coating technology : Ion Beam Sputtering (IBS)
- Spectral range : from 193 nm
- Reflectivity @ 193 nm : >98.5%
- Reflectivity from 257 nm : >99.9%
- Size : 3-420 mm
- Flatness : Up to <λ/20
- Surface quality : Up to 10-5 S-D over CA (MIL-PRF-13830B)
- LIDT : >0.3 J/cm², 193 nm, 9.6 ns, 30 Hz, 549 μm